9665766

FLT -> WFD: <λ/10 @ 633nm
Surface quality, S-D: 40-40
S1: AR (R<1.5%) @ 475-650 + AR (R<0.3%) @ 1064 nm, AOI=0 deg
S2: AR (R<1.5%) @ 475-650 + AR (R<0.3%) @ 1064 nm, AOI=0 deg